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Nanomoulding of Functional Materials, a Versatile Complementary Pattern Replication Method to Nanoimprinting
10:49

Nanomoulding of Functional Materials, a Versatile Complementary Pattern Replication Method to Nanoimprinting

Published on: January 23, 2013

通过反应性离子蚀刻进行合式光刻纳米图案制作.

Dae-Geun Choi1, Hyung Kyun Yu, Se Gyu Jang

  • 1Department of Chemical and Biomolecular Engineering, Korea Advanced Institute of Science and Technology, 373-1, Guseong-dong, Yuseong-gu, Daejeon 305-701 Korea.

Journal of the American Chemical Society
|June 4, 2004
PubMed
概括

这项研究引入了一种新的体光刻法方法,用于创建有序的非球形粒子阵列. 多层球体的反应性离子蚀刻产生了纳米图案和光子晶体的独特图案.

科学领域:

  • 材料科学 材料科学 材料科学
  • 纳米技术 纳米技术
  • 结合体科学 结合体科学

背景情况:

  • 制造有序的体结构对于先进的材料至关重要.
  • 非球形粒子为光子和纳米技术应用提供了独特的特性.
  • 现有的制造有序非球体粒子的方法是有限的.

研究的目的:

  • 开发一种新的体光刻方法,用于制造有序的非球体体粒子阵列.
  • 探索在多层球形合体颗粒上使用反应性离子蚀刻 (RIE).
  • 为了证明由此产生的结构在纳米图案和合体光子晶体中的潜在应用.

主要方法:

  • 具有不同结构的分层合体晶体在基板上的自我组织.
  • 选择性反应性离子蚀刻 (RIE) 的多层球形体颗粒.
  • 利用上层的合层作为一个面具,用于低层的异构蚀刻.

主要成果:

  • 成功制造了具有远程顺序的非球状合粒子阵列.
  • 由于RIE期间的阴影效应,产生了与原始球体不同形状的新图案.
  • 证明粒子和图案特征取决于晶体的方向,层数和RIE条件.

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结论:

  • 开发的RIE方法为非球状体粒子阵列提供了一条通用的途径.
  • 体图案作为有效的面具,用于创建二维 (2D) 纳米图案.
  • 非球形粒子是新型合体光子晶体的有希望的构建块.