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Analysis of Contact Interfaces for Single GaN Nanowire Devices
Published on: November 15, 2013
纳米线的表面化学和电气性能
Dunwei Wang1, Ying-Lan Chang, Qian Wang
1Contribution from the Department of Chemistry, Stanford University, Stanford, CA 94305, USA.
Journal of the American Chemical Society
|September 16, 2004
概括
表面化学显著影响纳米线 (GeNW) 晶体管. 使用HfO2通过化或被动化去除表面氧化物,可以消除歇斯底里,提高设备性能.
科学领域:
- 材料科学 材料科学 材料科学
- 纳米技术 纳米技术
- 半导体物理 半导体物理
背景情况:
- 纳米线 (GeNWs) 对下一代电子产品具有前景.
- 表面的化学成分极大地影响了GeNW的电特性.
- 了解表面效应是设备优化的关键.
研究的目的:
- 为了将表面化学与p型和n型GeNW场效应晶体管 (FET) 的电气特性相关联.
- 调查减轻与表面相关的歇斯底里和提高设备性能的方法.
主要方法:
- 使用化学蒸汽沉积 (CVD) 合成杂的GeNWs.
- 补充FET的制造. 补充FET的制造.
- 电力运输测量. 电力运输测量.
- 用于表面分析的X射线光电子光谱 (XPS).
- 真空回火和原子层沉积 (ALD) 用于表面被动化.
主要成果:
- 在GeNW FET中强烈的歇斯底里归因于GeO(2) 表面上的水分子.
- 表面氧化物导致费米水平的固定,导致p型和n型GeNW中不同的带曲.
- 在400°C以上的真空回火有效地去除氧化物并消除歇斯底里.
- 在ALD中生长的HfO(2) 在干净的GeNW上起到有效的被动化层的作用.
- 在直径小的GeNW中,表面效应占主导地位.
结论:
- 表面化学在GeNWs的电行为中起着主导作用.
- 优化表面被动化和氧化物去除对于可靠的GeNW设备操作至关重要.
- 这些发现对于推进基于的纳米电子技术至关重要.
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