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在聚合物薄膜中采用入笔纳米光刻法分离图案阶段

David C Coffey1, David S Ginger

  • 1Departments of Physics and Chemistry, University of Washington, Seattle, WA 98195-1700, USA.

Journal of the American Chemical Society
|March 31, 2005
PubMed
概括

滴笔纳米光刻法 (DPN) 能够精确控制聚合物薄膜中的纳米级相位分离. 这种快速原型制造方法有助于研究有机电子设备中的光电子过程.

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