两个金属在表面上的纳米尺度图案使用ABC三块式共聚合物模板
Masato Aizawa1, Jillian M Buriak
1National Institute for Nanotechnology and the Department of Chemistry, University of Alberta, Edmonton, Alberta, Canada T6G 2G2. maizawa@ualberta.ca
Journal of the American Chemical Society
|April 28, 2006
概括
纳米级金属薄膜在上采用自组装区块共聚合物的图案. 这种方法可以为先进的电子和传感应用提供精确的黄金和白银沉积.
科学领域:
- 材料科学 材料科学 材料科学
- 纳米技术纳米技术
- 表面化学 表面化学
背景情况:
- 用纳米级金属薄膜对半导体接口进行图案设计对于开发先进的金属互连和传感器件至关重要.
- 自组装区块共聚合物为实现在表面上纳米化工图案的实现提供了一个多功能平台.
研究的目的:
- 为了利用triblock共聚合物自组装用于表面金属沉积的纳米尺度图案.
- 为了研究不同金属复合物的区块共聚物域的化学选择性,在电位移反应中.
- 为了证明使用顺序沉积过程制造100nm以下的金属特征.
主要方法:
- 使用一个triblock共聚合物单层,聚乙烯-块-聚乙烯-化物 (PS-b-P2VP-b-PEO),作为选择性金属沉积的模板.
- 采用电位移反应来进行黄金和银等金属的水性沉积.
- 使用扫描电子显微镜 (SEM),扫描奥格尔显微镜 (SAM),X射线光电子谱学 (XPS) 和原子力显微镜 (AFM) 进行图案接口的特征化.
主要成果:
- 区块共聚合物结构指导着黄金和银的选择性沉积,黄金反映了核心结构,银在冠冕下定位.
- 随着黄金接着银的顺序沉积,可以创建由银膜环绕的亚-100纳米金色特征.
- 化学选择性已成功扩展到其他金属,包括铜,和.
结论:
- 自组装区块共聚物为半导体接口上的金属沉积的纳米化工图案提供了一个强大的工具.
- 这种技术可以精确制造复杂的金属纳米结构,用于电子和传感应用.
- 证明的化学选择性和顺序沉积为先进材料制造提供了一种多功能方法.
相关概念视频
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