Xiangdong Feng1, Dean C Sayle, Zhong Lin Wang

  • 1Ferro Corporation, 7500 East Pleasant Vally Road, Independence, OH 44131, USA. shawn.feng@jhresearchusa.com

Science (New York, N.Y.)
|June 10, 2006
PubMed
概括

我们开发了用于化学机械平面化的单晶烯酸纳米球,显著减少缺陷并提高了可靠的纳米电子芯片制造的二氧化去除率.