在柔性塑料基板上的中等尺寸碳纳米管薄膜集成电路
Qing Cao1, Hoon-sik Kim, Ninad Pimparkar
1Department of Chemistry, University of Illinois at Urbana-Champaign, Urbana, Illinois 61801, USA.
Nature
|July 25, 2008
概括
使用塑料上的单壁碳纳米管网络创建了高性能灵活的集成电路. 这些电路提供了出色的晶体管性能,并为灵活的电子产品提供了新的可能性.
科学领域:
- 材料科学 材料科学 材料科学
- 电气工程 电气工程
- 纳米技术纳米技术
背景情况:
- 灵活的电子产品比传统的刚性基板具有独特的优势.
- 现有的有机和无机柔性半导体的性能有限.
- 对于先进的应用,需要高性能灵活的集成电路.
研究的目的:
- 开发使用基于碳的半导体的高性能灵活集成电路.
- 为了证明使用单壁碳纳米管网络用于灵活电子的可行性.
- 描述这些集成电路中的晶体管的性能和性能.
主要方法:
- 在塑料基板上实施单壁碳纳米管的亚单层,随机网络.
- 制造小到中等规模的集成数字电路,最多有100个晶体管.
- 晶体管属性的表征,包括移动性,下值斜率,工作电压,开/关比和开关速度.
- 理论计算包括运输,紧型模型和电路模拟.
主要成果:
- 实现了高晶体管流动性 (高达80cm2/Vs) 和开/关比 (高达105).
- 经证明的低工作电压 (<5V) 与受控制的门电压.
- 展示的千赫兹开关速度,即使具有粗的设备几何形状 (约. 100 微米). 这是一个很大的问题.
- 展示了良好的机械灵活性,均性和可重复性,使得高产量制造成为可能.
结论:
- 单壁碳纳米管的子单层薄膜是高性能灵活集成电路的有希望的材料.
- 这些材料可以在具有优良性能的塑料基板上创建功能集成电路.
- 开发的技术具有在消费电子产品及其他领域应用的巨大潜力.
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