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Fabricating Reactive Surfaces with Brush-like and Crosslinked Films of Azlactone-Functionalized Block Co-Polymers
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通过定向块共聚合物组件的密度乘法和改进的光刻法.

Ricardo Ruiz1, Huiman Kang, François A Detcheverry

  • 1Hitachi Global Storage Technologies, San Jose Research Center, 3403 Yerba Buena Road, San Jose, CA 95135, USA. Ricardo.Ruiz@hitachigst.com

Science (New York, N.Y.)
|August 16, 2008
PubMed
概括

研究人员指导了块共聚合物材料的自组装,实现了无缺陷的阵列,显著提高了纳米技术应用的密度和均性.

科学领域:

  • 材料科学 材料科学 材料科学
  • 纳米技术纳米技术
  • 聚合物化学 聚合物化学

背景情况:

  • 自组装材料,特别是块共聚合物,对于纳米技术至关重要.
  • 在块共聚合物自组装中的小型热力学驱动力往往导致陷入,低能耗缺陷.
  • 控制缺陷形成对于精确的纳米结构制造至关重要.

研究的目的:

  • 引导区块共聚合物领域的自我组装进入无缺陷的数组.
  • 为了提高纳米结构的密度和尺寸统一性.
  • 研究化学图案表面用于定向自组装的使用.

主要方法:

  • 利用化学图案的表面来引导块共聚合物的自组装.
  • 工程条件,以尽量减少在自组装过程中的缺陷形成.
  • 分析了由此产生的纳米结构的域密度,大小和统一性.

主要成果:

  • 实现了孤立块共聚合物域的无缺陷数组.
  • 它们的密度高达每平方英寸1特拉比特.
  • 与化学模式相比,域密度增加了四倍,域大小减少了两倍,尺寸均性大大提高.

结论:

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  • 化学图案的表面有效地引导了区块共聚合物的自组装.
  • 这种方法可以创建高度有序,高密度的纳米结构.
  • 该方法为纳米技术应用提供了密度,尺寸控制和统一性的显著改进.