湿湿

Haitao Liu1, Michael L Steigerwald, Colin Nuckolls

  • 1Department of Chemistry and the Columbia University Center for Electronics of Molecular Nanostructures, Columbia University, 3000 Broadway, New York, New York 10027, USA.

概括

碳纳米管 (CNTs) 通过缩氧化离子来催化二氧化湿蚀刻. 这种效应使得纳米级特征的制造成为可能,通过60纳米沟来证明.