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高速石墨烯晶体管与一个自我调整的纳米线网关

Lei Liao¹, Yung-Chen Lin, Mingqiang Bao

¹Department of Chemistry and Biochemistry, University of California, Los Angeles, California 90095, USA.

|September 3, 2010

概括

研究人员开发了高速石墨烯晶体管,使用自调整的纳米线网关. 这种新的制造方法保存了石墨烯.

科学领域:

材料科学材料科学材料科学
电气工程电气工程
纳米技术纳米技术

背景情况:

石墨烯具有很高的载体移动性,这使得它成为高速电子产品的前景.
石墨烯晶体管的传统制造方法引入了缺陷,降低了性能.
现有的方法在基于石墨烯的高速设备中难以达到最佳性能.

研究的目的:

为高速石墨烯晶体管开发一种制造方法,克服性能降解问题.
使用自调整的纳米线网关来精确定位电极并最大限度地降低接入阻力.
通过保持石墨烯的内在特性来实现前所未有的晶体管性能.

主要方法:

制造石墨烯晶体管使用自调整的Co(2)Si-Al(2)O(3) 核心外纳米线门.
自调整过程用于定义源电极和排水电极,其通道长度由纳米线直径决定.
通过物理组装网关结构来保护石墨烯的高载体流动性.

主要成果:

成功制造了通道长度低至140 nm的石墨烯晶体管.
实现了最高报告的缩放电流 (3.32 mA/μm) 和透导 (1.27 mS/μm).
已证明高的内在切断频率 (f T) = 100300 GHz),与最先进的设备可比.

结论:

自行调整的纳米线门制造方法有效地防止了石墨烯晶体管的性能下降.
这种方法可以创建具有优越电气特性的高速石墨烯晶体管.
实现的内在切断频率表明了石墨烯在下一代高频电子产品中的潜力.

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