缩放碳纳米管互补晶体管到5nm长
Chenguang Qiu1, Zhiyong Zhang2, Mengmeng Xiao1
1Key Laboratory for the Physics and Chemistry of Nanodevices and Department of Electronics, Peking University, Beijing 100871, China.
概括
研究人员开发了超越性能的高性能碳纳米管场效应晶体管 (CNT FET). 这些5nm CNT FET 运行速度更快,电压更低,并且接近下一代电子的量子极限.
科学领域:
- 纳米技术
- 材料科学
- 电气工程
背景情况:
- 互补金属氧化物半导体 (CMOS) 场效应晶体管 (FET) 面临扩展限制.
- 碳纳米管场效应晶体管 (CNT FET) 提供了在纳米尺度上提高性能的潜力.
研究的目的:
- 制造和评估具有5纳米门长度的高性能CNT FET.
- 将缩放式CNT FET与CMOS FET的性能进行比较.
- 研究新一代电子设备中CNT的潜力.
主要方法:
- 使用石墨烯接触器制造5纳米长的顶端CNT FET.
- 性能描述包括运行速度,电源电压和下值斜率.
- 基于CNT的设备和CMOS逆变器的扩展趋势分析.
主要成果:
- 在相同的尺度上,已证明5nm长CNT FET的性能优于CMOS FET.
- 实现了显著较低的供应电压 (0.4V vs 0.7V) 和小值斜率 (73 mV/十年).
- CNT FET 接近量子极限,使用单个电子进行切换操作.
- 使用缩放的CNT和25nm接触长度展示了一个CMOS逆变器.
结论:
- 具有超短门长度的高性能CNT FET是可以实现的,并且超过了技术.
- CNT FET提供了通往超低功耗和高速电子的可行途径.
- 展示的扩展和性能指标突出显示了未来集成电路中CNT的潜力.
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