同一个前体,两个不同的产品:使用对分布函数分析比较In-Ga-O"凝衍生"粉末和溶液造膜的结构演变
Suzannah R Wood1, Keenan N Woods1, Paul N Plassmeyer1
1Department of Chemistry and Biochemistry, and Material Science Institute, University of Oregon , Eugene, Oregon 97403, United States.
Journal of the American Chemical Society
|March 23, 2017
概括
氧化物薄膜和粉末的结构演变不同. 先进的X射线散射揭示了无形β-Ga2O3作为主要阶段,对于理解无形金属氧化物应用至关重要.
科学领域:
- 材料科学
- 固态化学
背景情况:
- 无形金属氧化物对于技术用途至关重要,氧化物是薄膜晶体管的关键材料.
- 了解这些材料的结构特性对于优化它们的性能至关重要.
研究的目的:
- 研究氧化物凝衍生的粉末和薄膜的结构演变.
- 来自同一前体的粉末和膜之间的结构差异进行比较.
- 探索对分布函数 (PDF) 分析在形态阶段的特征的实用性.
主要方法:
- 红外振动光谱学
- 射线衍射 (XRD)
- 对X射线总散射的对分布函数 (PDF) 分析 (包括薄膜PDF - tfPDF)
主要成果:
- 来自凝的粉末和薄膜表现出明显的温度依赖的结构演变.
- 这两种材料均为Ga替代的In2O3和In替代的β-Ga2O3的混合物.
- 无形/纳米晶体β-Ga2O3被确定为主导阶段,通常无法通过常规XRD检测.
- tfPDF分析成功地描述了无形β-Ga2O3阶段,揭示了它的结构特征.
结论:
- 布拉格衍射和tfPDF的组合提供了金属氧化物薄膜的全面结构分析.
- tfPDF分析是阐明无形材料结构的强大工具.
- 了解这些结构细节是将加工条件与氧化物结构属性关系相关的关键.
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