极紫外线折射光学
L Drescher1, O Kornilov2, T Witting1
1Max-Born-Institut, Berlin, Germany.
Nature
|November 30, 2018
概括
科学家使用气体镜控制极紫外线 (EUV) 光折射. 这一突破使得新型EUV折射镜头的开发成为可能,克服了以前的吸收限制.
科学领域:
- 光学和光学
- 原子和分子物理
背景情况:
- 折射对于各种波长的光操纵至关重要.
- 极紫外线 (EUV) 辐射被物质强烈吸收,限制了折射光学的发展.
- 目前的EUV聚焦依赖于反射镜和衍射弗雷内尔区域板.
研究的目的:
- 为了证明对极紫外线 (EUV) 光折射的控制.
- 为EUV光谱区域开发新的折射光学元件.
- 克服传统EUV折射光学的高吸收的局限性.
主要方法:
- 使用控制密度梯度的气体喷射来创建折射率.
- 产生了一个气相镜来转移EUV光束.
- 研究频率依赖的偏移,特别是在原子共振附近.
- 通过调节气体压力开发了可变形的折射镜头.
主要成果:
- 通过气体喷射成功证明了EUV辐射的折射.
- 创建了一个气相镜, 显示频率依赖的光束偏移.
- 开发了一种可调节,低吸收的可折射透镜,用于EUV光.
- 在原子共振附近实现了偏移增强.
结论:
- 使用气相介质可以控制EUV折射.
- 这项工作为基于折射的技术在EUV领域的应用铺平了道路.
- 开发的可变形镜头为EUV光学提供了可调节的焦距和低吸收的新工具.
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