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单体压电控制单体微
Junqiu Liu1, Hao Tian2, Erwan Lucas1,3
1Laboratory of Photonics and Quantum Measurements, Swiss Federal Institute of Technology Lausanne (EPFL), Lausanne, Switzerland.
Nature
|July 17, 2020
概括
我们开发了一种用于微电的集成压电驱动器, 这一突破为像激光雷达这样的应用提供了更快,更低功率的光频.
科学领域:
- 光子学和光学工程
- 材料科学
- 电气工程
背景情况:
- 高速激光频率激活对于光学时钟,频率合成和稳定性转移至关重要.
- 现有的集成微电,由热执行器 (高达10kHz) 限制,需要外部组件来控制兆赫的带宽.
- 索利顿微提供芯片规模的频率,但缺乏集成的高速执行.
研究的目的:
- 为了展示高速度,集成的启动单体微.
- 使用压电元件实现单子微的兆赫带宽控制.
- 为了实现微型的新应用,例如先进的激光雷达系统.
主要方法:
- 在超低损耗酸 (Si3N4) 光子电路上集成酸 (AlN) 压电驱动器.
- 用电压控制的单子启动,调整和稳定.
- 执行器性能的描述,包括带宽,功耗,线性和歇斯底里.
主要成果:
- 实现了单子微的兆赫带宽激活,超过了先前的集成和散装调制器限制.
- 证明了低功耗 (300nW),高线性和低歇斯底里的双向调整.
- 启用频率调制的激光雷达引擎,增加频率,降低功率,减少扭曲.
- 展示了用于降低电压的共振增强,与CMOS电子相兼容.
结论:
- 集成的压电驱动提供了超低功率,高速控制的单体微.
- 这项技术显著扩大了芯片尺度频率的适用性.
- 开发的方法为传感和通信的先进光子集成电路铺平了道路.
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