电子图解达到了由格子振动设定的原子分辨率极限
Zhen Chen1, Yi Jiang2, Yu-Tsun Shao3
1School of Applied and Engineering Physics, Cornell University, Ithaca, NY 14853, USA. zhen.chen@cornell.edu david.a.muller@cornell.edu.
Science (New York, N.Y.)
|May 21, 2021
概括
在传输电子显微镜中,电子光学克服了透镜偏差和散射. 这种技术实现了20比克米以下的分辨率,使原子尺度成像和3D剂原子定位成为可能.
科学领域:
- 材料科学
- 物理
- 显微镜
背景情况:
- 由于电子波长短,传输电子显微镜 (TEM) 提供了原子分辨率潜力.
- 镜头偏差和样本中的电子多重散射会降低图像质量.
- 与原子的内在尺寸相比,目前的TEM分辨率显著受到限制.
研究的目的:
- 克服因镜头偏差和多重散射造成的TEM分辨率限制.
- 展示一种实现近内在原子分辨率成像的方法.
- 能够精确地3D定位材料中的剂原子.
主要方法:
- 使用电子图像学,一种计算成像技术.
- 开发了反向解决电子多重散射问题的方法.
- 纠正了TEM固有的电子探针误差.
主要成果:
- 仪器模糊度低于20比克米.
- 即使在厚的样本中也表现出线性相应反应.
- 测量原子柱宽度仅限于原子的热波动.
- 通过单次测量成功地在3D中定位嵌入的原子剂原子.
结论:
- 通过纠正偏差和散射,电子光学显著提高TEM分辨率.
- 开发的方法允许接近理论原子极限的成像.
- 使用这种先进的显微镜技术, 精确的3D原子剂分析是可行的.
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