作为二维晶体管绝缘体的高κ矿膜
Jing-Kai Huang1, Yi Wan2, Junjie Shi3
1School of Materials Science and Engineering, University of New South Wales, Sydney, New South Wales, Australia. jing-kai.huang1@student.unsw.edu.au.
Nature
|May 13, 2022
概括
研究人员开发了用于二维晶体管的超高κ氧化物膜. 这些材料通过实现亚纳米电容等效厚度和低泄漏电流,使低功耗电子成为可能.
科学领域:
- 材料科学
- 半导体物理
- 纳米技术
背景情况:
- 晶体管中的缩面临诸如10纳米以下节点的泄漏电流等挑战.
- 由于其原子厚度,二维 (2D) 半导体为未来的晶体管提供了潜力.
- 在保持低电容等效厚度 (CET) 的同时,将高介电常量 (κ) 材料与二维半导体集成是困难的.
研究的目的:
- 探索可转移的超高-κ单晶氧化膜作为二维场效应晶体管的门介电物.
- 解决用于先进晶体管应用的高κ介电材料与二维材料的整合挑战.
主要方法:
- 制造超高κ单晶矿氧化物膜.
- 将这些膜作为2D半导体通道材料的门介电体集成.
- 晶体管性能,包括电容等效厚度 (CET),泄漏电流,下值摆动和开/关电流比率.
主要成果:
- 矿膜实现了低泄漏电流 (<10-2A/cm2在2.5MV/cm) 的CET.
- 介电和二维半导体之间的范德瓦尔斯间隙减轻了边缘诱导的屏障降低.
- 晶体管表现出的下值波动 (约70mV/十年) 和高开/关比 (高达107).
结论:
- 超高-κ氧化物膜是2D场效应晶体管的有希望的门介电.
- 开发的材料符合"国际设备和系统路线图"所列的低功耗规格.
- 这项工作推动了下一代晶体管的发展,超越了传统的缩.
相关概念视频
Metal-Semiconductor Junctions
538
The contact of metal and semiconductor can lead to the formation of a junction with either Schottky or Ohmic behavior.
Schottky Barriers
Schottky barriers arise when a metal with a work function (Φm) contacts a semiconductor with a different work function (Φs). Initially, electrons transfer until the Fermi levels of the metal and semiconductor align at equilibrium. For instance, if Φm > Φs, the semiconductor Fermi level is higher than the metal's before contact. The...
Schottky Barriers
Schottky barriers arise when a metal with a work function (Φm) contacts a semiconductor with a different work function (Φs). Initially, electrons transfer until the Fermi levels of the metal and semiconductor align at equilibrium. For instance, if Φm > Φs, the semiconductor Fermi level is higher than the metal's before contact. The...
538
Types of Semiconductors
960
Intrinsic semiconductors are highly pure materials with no impurities. At absolute zero, these semiconductors behave as perfect insulators because all the valence electrons are bound, and the conduction band is empty, disallowing electrical conduction. The Fermi level is a concept used to describe the probability of occupancy of energy levels by electrons at thermal equilibrium. In intrinsic semiconductors, the Fermi level is positioned at the midpoint of the energy gap at absolute zero. When...
960
Schottky Barrier Diode
520
Schottky barrier diodes are specialized semiconductor devices characterized by their unique construction. This construction involves combining a metal layer with a moderately doped n-type semiconductor material. This combination leads to the formation of a Schottky barrier, a pivotal element that defines the diode's operational characteristics. The core functionality of Schottky barrier diodes is their capacity to allow current to flow in only one direction due to their distinctive...
520


