在Ni (111) 上采用Epitaxial单晶六角化物多层
Kyung Yeol Ma1,2, Leining Zhang2,3, Sunghwan Jin2,4
1Department of Chemistry, Ulsan National Institute of Science and Technology (UNIST), Ulsan, Republic of Korea.
Nature
|June 1, 2022
概括
研究人员使用化学蒸汽沉积实现了单晶三层六角化物 (hBN) 的晶片规模生长. 这一突破为先进的二维 (2D) 半导体提供了高质量的hBN基材.
科学领域:
- 材料科学
- 凝聚物质物理学
- 纳米技术
背景情况:
- 像石墨烯和过渡金属二基因化物这样的二维 (2D) 材料对于下一代电子产品至关重要.
- 六角化 (hBN) 是2D场效应晶体管 (FET) 的理想介电体,可能扩展摩尔定律.
- 之前的研究缺乏统一的单晶多层hBN生长方法,这阻碍了其作为基质的使用.
研究的目的:
- 开发一种单晶多层六角化物 (hBN) 的培养方法.
- 展示这种高质量的hBN作为二维半导体设备的介电基材的潜力.
主要方法:
- 在单晶Ni (111) 上通过化学蒸汽沉积 (CVD) 增长三层hBN.
- 使用横截面传递电子显微镜 (TEM) 分析膜结构和间层的特征.
- 将hBN薄膜转移到SiO2/Si晶片上用于设备制造和测试.
主要成果:
- 一个单晶三层hBN的成功生长.
- 在冷却过程中,hBN和Ni基板之间形成一个Ni23B6中间层,并确定了表轴关系.
- 证明了hBN作为保护层的有效性,以及其在作为介电剂时减少MoS2 FET中的电子注的能力.
结论:
- 这项工作提供了一种生产高质量,大面积单晶多层hBN的可行方法.
- 开发的hBN薄膜适用于2D半导体的无处不在基板.
- 这一进步为提高二维电子设备的性能和集成铺平了道路.
相关概念视频
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The structure of a crystalline solid, whether a metal or not, is best described by considering its simplest repeating unit, which is referred to as its unit cell. The unit cell consists of lattice points that represent the locations of atoms or ions. The entire structure then consists of this unit cell repeating in three dimensions. The three different types of unit cells present in the cubic lattice are illustrated in Figure 1.
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