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Qianqian Wang1, Hao Cui1, Xiaolin Wang1

  • 1Institute of Nuclear and New Energy Technology, Tsinghua University, Beijing100084, China.

概括

点击光刻技术使用高效的烯反应进行超高通量纳米制造. 这种方法实现了高对比度,高分辨率的图案在显著较低的曝光剂量比传统的光刻.

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