一个基于热的气体流量传感器,具有高灵敏度,用于非侵入性呼吸监测
Zemin Liu1,2,3, Chenchen Zhang2, Xuefeng Ding3
1School of Instrument and Electronics, North University of China, Taiyuan 030051, China.
Micromachines
|May 27, 2023
概括
一个新的N / P聚Si热气体流量传感器提供了高灵敏度和精度. 这种紧,易于生产的设备可以实时监测呼吸,以早期检测潜在的健康问题.
科学领域:
- 微电子机械系统 (MEMS) 是指微电子机械系统.
- 传感器技术 传感器技术
- 生物医学工程 生物医学工程
背景情况:
- 气体流量传感对于各种应用至关重要.
- 现有的传感器可能缺乏灵敏度,速度或长期稳定性.
- 非侵入性呼吸监测需要准确可靠的设备.
研究的目的:
- 开发一种高性能N/P聚Si热式气流传感器.
- 评估其性能特征,包括灵敏度,响应时间和准确性.
- 为了证明其在医疗保健实时呼吸监测中的实用性.
主要方法:
- 使用嵌入式形微型加热器制造N/P聚Si热.
- 在热电偶热接口周围集成微型加热器.
- 传感器性能的表征 (灵敏度,响应时间,精度,稳定性).
- 传感器用于实时呼吸监测的应用.
主要成果:
- 实现了高灵敏度 (6.6μV/sccm/mW) 和精度 (0.95%).
- 证明了快速响应时间 (35ms) 和出色的长期稳定性.
- 成功收集了详细的呼吸节奏波形.
- 启用了呼吸周期和幅度的提取,用于异常检测.
结论:
- N/P polySi热气体流量传感器提供了卓越的性能和稳定性.
- 该传感器适用于紧,易于生产和经济高效的气体流量测量.
- 这项技术为非侵入性呼吸监测和早期检测异常状况提供了一种新的方法.
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