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作为MEMS磁器件软磁材料的SiCNFe陶:一个Mössbauer研究

Ion Stiharu¹, Sergey Andronenko², Almaz Zinnatullin²

¹Department of Mechanical, Industrial and Aerospace Engineering, Concordia University, Montreal, QC H3G 1M8, Canada.

|May 27, 2023

概括

聚合物衍生的SiCNFe陶显示出磁性MEMS应用的潜力. 莫斯巴乌尔光谱学揭示了复杂的铁纳米粒子形成,表明在1100°C不完全热解,这对于优化磁性而言至关重要.

科学领域:

材料科学材料科学材料科学
纳米技术纳米技术
陶工程陶工程陶工程

背景情况:

聚合物衍生的SiCNFe陶对微电子机械系统 (MEMS) 磁性应用具有前景.
实现同质和统一的磁性材料对于开发先进的MEMS设备至关重要.
了解SiCNFe陶的精确成分对于微型制造至关重要.

研究的目的:

为了研究SiCNFe陶中含铁磁纳米粒子的相组合.
为了准确地确定Fe-doped SiCN陶的组成,在1100°C时化.
为了将纳米粒子组成与材料的磁性特征相关联.

主要方法:

使用Mössbauer光谱分析了用Fe (III) 离子合的SiCN陶.
样品在1100°C时冷,在室温进行测量.
分析的重点是识别和量化在热解过程中形成的含铁相.

主要成果:

莫斯巴乌尔的数据显示了多个含铁纳米颗粒的形成:α-Fe,Fe_xSi_yC_z,以及Fe-N的痕迹.
还检测到具有八面体氧气协调的偏磁Fe3+离子.
铁化物和偏磁性Fe3+的存在表明在1100°C时的热解不完全.

结论:

在SiCNFe陶中,在1100°C的热解过程尚未完全完成.
在SiCNFe陶复合材料中,复杂的含铁纳米粒子具有多种组成.
这些发现对于为磁性MEMS应用量身定制SiCNFe陶至关重要.

关键词:

在MEMS磁性执行器.莫斯巴乌尔光谱法莫斯巴乌尔光谱法这是一种SiCNFe复合材料.纳米颗粒是一种纳米粒子.软磁铁是一种柔软的磁铁.

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