基于双模糊PID控制的MEMS热重量分析仪的高速温度控制方法
Xiaoyang Zhang1, Zhi Cao2,3, Shanlai Wang1
1School of Microelectronics, Shanghai University, Shanghai 200444, China.
Micromachines
|May 27, 2023
概括
微电机系统热重量分析仪 (MEMS TGA) 提供更快的加热速度. 一种新的双模糊比例积分导数 (PID) 控制方法增强了MEMS TGA温度控制,减少了超标并提高了性能.
科学领域:
- 分析化学 分析化学
- 材料科学 材料科学 材料科学
- 控制工程 控制工程 控制工程
背景情况:
- 传统的热重量分析仪 (TGA) 存在热滞后,限制了加热速度.
- 微电机系统热重量分析仪 (MEMS TGA) 提供了诸如芯片内加热和高质量灵敏度等优势.
- MEMS TGA的小加热面积和结构消除了热滞后,使加热速度更快.
研究的目的:
- 为MEMS TGA开发一种高速温度控制方法.
- 为了解决系统的非线性,并最大限度地减少MEMS TGA温度控制中的超越.
- 为了提高MEMS TGA的整体加热性能.
主要方法:
- 关于双模糊比例积分导数 (PID) 控制策略的建议.
- 使用模糊逻辑控制实时调整PID参数.
- 对拟议的控制方法进行模拟和实验验证.
主要成果:
- 与传统的PID控制相比,双模糊PID控制方法显示出更快的响应速度.
- 拟议的方法显著减少了温度控制期间的超标.
- 在使用双模糊PID控制的MEMS TGA中观察到更好的加热性能.
结论:
- 双模糊PID控制是MEMS TGA中高速温度控制的有效方法.
- 这种方法克服了MEMS TGA应用中的传统PID控制的局限性.
- 增强的温度控制显著提高了MEMS TGA的加热性能.
相关概念视频
01:19PID Controller
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Proportional-Integral-Derivative (PID) controllers are widely used in various control systems to enhance stability and performance. In a thermostat, it adjusts heating or cooling based on the temperature difference between the actual and desired levels. They are often used in automotive speed systems, effectively managing sudden speed changes while maintaining a constant speed under varying conditions. On the other hand, PI controllers, commonly employed in voltage regulation, enhance stability...
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01:27Time and frequency -Domain Interpretation of PI Control
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Proportional-Integral (PI) controllers are essential in many control systems to improve stability and performance. They are commonly used in everyday devices like thermostats to enhance system damping and reduce steady-state error. When the zero in the controller's transfer function is optimally placed, the system benefits significantly in terms of stability and accuracy.
Acting as a low-pass filter, the PI controller slows the system's response and extends settling times. This requires...
Acting as a low-pass filter, the PI controller slows the system's response and extends settling times. This requires...
167