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Updated: Jul 29, 2025

ARL Spectral Fitting as an Application to Augment Spectral Data via Franck-Condon Lineshape Analysis and Color Analysis
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ARL Spectral Fitting as an Application to Augment Spectral Data via Franck-Condon Lineshape Analysis and Color Analysis

Published on: August 19, 2021

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一个晶圆预调整算法,基于权重的富里埃数列圆形和最小正方形的圆形和最小正方形的圆形

Jingsong Chen1,2,3,4, Zhou Lan1,2,3,4, Cheng Xue1,2,3,4

  • 1National Key Laboratory of Optical Field Manipulation Science and Technology, Chinese Academy of Sciences, Chengdu 610209, China.

Micromachines
|May 27, 2023
PubMed
概括

一种新的加权里埃序列圆圈配合 (WFC) 方法提高了晶圆预对齐的精度和效率. 这种先进的技术提供了优越的稳定性和准确性,相比传统的最小正方形安装方法.

关键词:
旋转扫描检测边缘检测边缘检测最小的正方形适合圆的方法.晶圆预调整的预调整权重的福里埃数列圆圈的方法.

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