概念验证真空微电子NOR门使用微电子机械系统和碳纳米管场发射器制造的真空微电子NOR门
Tasso von Windheim1, Kristin H Gilchrist2, Charles B Parker1
1Department of Electrical and Computer Engineering, Duke University, Durham, NC 27708, USA.
Micromachines
|May 27, 2023
概括
本研究介绍了一种使用碳纳米管 (CNT) 场发射器的新型真空微电子NOR逻辑门. 该设备显示出对高辐射应用的承诺,展示了基本的逻辑功能和辐射生存能力.
科学领域:
- 微电子机械系统 (MEMS) 是一种微电子机械系统.
- 真空微电子学 微电子学
- 纳米技术 纳米技术
背景情况:
- 真空微电子设备在恶劣环境中提供了潜在的优势.
- 碳纳米管 (CNT) 场发射器对微型真空设备有很大的希望.
- 现有的微型制造技术可以适应复杂的真空电子电路.
研究的目的:
- 为了展示一个完全集成的真空微电子NOR逻辑门.
- 评估基于CNT的真空微电子设备的性能和辐射生存能力.
- 在高辐射环境中建立复杂的真空逻辑设备的概念验证.
主要方法:
- 使用微加工的多晶面板和CNT场辐射阴极制造NOR逻辑门.
- 使用多多用户MEMS过程 (polyMUMPs) 集成两个平行真空四旋翼.
- 在马辐射暴露下测试简化二极管装置结构 (45.6 rad (Si) /秒).
主要成果:
- 成功演示了NOR逻辑门功能与并行真空四旋翼.
- 在单个四极管中观察到类似晶体管的性能,尽管传导率低 (7.6 × 10-9 S) 和未达到的电流和.
- 由于CNT发射器特征的变化,观察到不对称的性能.
- 在马辐射暴露期间,二极管装置的功能演示,表明辐射生存能力.
结论:
- 制造的真空微电子NOR逻辑门可以作为复杂逻辑设备的概念验证.
- 该设备平台显示了在高辐射环境中的应用潜力.
- 需要进一步优化,以解决性能限制,如透导和不对称性.
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