相关实验视频

Updated: Jul 29, 2025

Fabrication of 3D Carbon Microelectromechanical Systems C-MEMS

Fabrication of 3D Carbon Microelectromechanical Systems C-MEMS

Published on: June 17, 2017

基于CMOS技术的微电子机械三轴磁场传感器的设计和测量

Chi-Han Wu¹, Cheng-Chih Hsu², Yao-Chuan Tsai³

¹Department of Mechanical Engineering, National Chung Hsing University, Taichung 402, Taiwan.

|May 27, 2023

概括

本研究介绍了一种使用商业CMOS工艺制造的新型微电机系统 (MEMS) 三轴磁场传感器 (MFS). 开发的MFS显示出高灵敏度和低交叉灵敏度,用于精确的磁场测量.

科学领域:

微电子机械系统 (MEMS) 是一种微电子机械系统.
半导体设备物理半导体设备物理
磁场检测磁场检测磁场检测

背景情况:

精确的磁场传感对于各种应用至关重要.
现有的磁场传感器经常面临交叉灵敏度和集成方面的挑战.
微电子机械系统 (MEMS) 提供了小型化和性能增强的潜力.

研究的目的:

设计,制造和描述一个新的MEMS三轴磁场传感器 (MFS).
通过半导体模拟和实验测量来研究MFS的性能.
在多轴磁场传感配置中最大限度地降低交叉灵敏度.

主要方法:

使用Sentaurus TCAD进行半导体设备模拟.
设计了一个独特的MFS结构,具有独立的z-MFS和y/x-MFS组件.
使用TSMC 1P6M 0.18微米CMOS工艺制造了MFS.
在z-MFS中整合了四个额外的收集器以提高灵敏度.

主要成果:

在MFS实现低交叉灵敏度不到3%.
对于每个轴的高灵敏度证明:z-MFS (237 mV/T),y-MFS (485 mV/T) 和x-MFS (484 mV/T).
模拟和实验结果验证了传感器的性能.

结论:

开发的MEMS MFS有效地以高精度在三个轴上测量磁场.
新的设计成功地降低了交叉灵敏度,提高了测量准确度.
将MEMS技术与CMOS工艺集成,可以高效地制造先进的磁传感器.

关键词:

这是一个CMOS系统.在MEMS MEMS中使用.交叉敏感性的交叉敏感性灵敏度灵敏度灵敏度灵敏度灵敏度三轴磁场传感器三轴磁场传感器

更多相关视频

Fabrication of Magnetic Platforms for Micron-Scale Organization of Interconnected Neurons

Fabrication of Magnetic Platforms for Micron-Scale Organization of Interconnected Neurons

Published on: July 14, 2021

Using Micro-Electro-Mechanical Systems MEMS to Develop Diagnostic Tools

Using Micro-Electro-Mechanical Systems MEMS to Develop Diagnostic Tools

Published on: October 1, 2007

相关概念视频

Magnetic Field Of A Current Loop

Magnetic Field Of A Current Loop

Consider a circular loop with a radius a, that carries a current I. The magnetic field due to the current at an arbitrary point P along the axis of the loop can be calculated using the Biot-Savart law.

Magnetic Field of a Solenoid

Magnetic Field of a Solenoid

A solenoid is a conducting wire coated with an insulating material, wound tightly in the form of a helical coil. The magnetic field due to a solenoid is the vector sum of the magnetic fields due to its individual turns. Therefore, for an ideal solenoid, the magnetic field within the solenoid is directly proportional to the number of turns per unit length and the current. Conversely, the magnetic field outside the solenoid is zero.
Consider a solenoid with 100 turns wrapped around a cylinder of...

Magnetic Field Due to Two Straight Wires

Magnetic Field Due to Two Straight Wires

Consider two parallel straight wires carrying a current of 10 A and 20 A in the same direction and separated by a distance of 20 cm. Calculate the magnetic field at a point "P2", midway between the wires. Also, evaluate the magnetic field when the direction of the current is reversed in the second wire.