SOI,

Le Hao1, Cun Li1, Lukang Wang1

  • 1State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an 710049, China.

Micromachines
|May 27, 2023
PubMed
概括

这项研究引入了一种具有横梁膜的新型SOI压力传感器,提高了高温应用的动态性能. 优化的传感器表现出高精度和可靠性,非常适合严苛的环境.