高温SOI压力传感器的设计和制造,具有优化的横梁膜
Le Hao1, Cun Li1, Lukang Wang1
1State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an 710049, China.
Micromachines
|May 27, 2023
概括
这项研究引入了一种具有横梁膜的新型SOI压力传感器,提高了高温应用的动态性能. 优化的传感器表现出高精度和可靠性,非常适合严苛的环境.
科学领域:
- 材料科学与工程 材料科学与工程
- 微电子机械系统 (MEMS) 是一种微电子机械系统.
- 传感器技术 传感器技术
背景情况:
- 小范围压力传感器在高温 (例如200°C) 时往往表现不佳的动态性能.
- 现有的传感器设计在恶劣的高温环境中难以获得可靠性和准确性.
研究的目的:
- 开发和优化一个SOI (在绝缘体上) 压电阻压传感器,在高温下提高动态性能.
- 为了提高压力传感器的耐高温和长期可靠性.
主要方法:
- 使用结合有限元和曲线拟合理论模型的横梁膜结构的设计优化.
- 使用MEMS批量微加工技术制造传感器芯片.
- 整合Ti/Pt/Au金属可以提高高温耐用性.
主要成果:
- 优化的传感器结构实现了高灵敏度,同时考虑了非线性.
- 实验测试证实在高温下表现出色:精度为0.241%FS,非线性为0.180%FS,歇斯底里斯为0.086%FS,重复性为0.137%FS.
- 传感器在长时间高温操作下表现出良好的可靠性和性能.
结论:
- 拟议的SOI压力传感器具有横束膜,有效地解决了在高温下小范围传感器的动态性能限制.
- 优化的设计和制造过程产生了一种可靠和准确的传感器,适用于高温压力测量应用.
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