通过抛物线镜引入聚焦光进入传输电子显微镜
Yoshikazu Adachi1, Naoki Yamamoto1, Takumi Sannomiya1
1School of Materials and Chemical Technology, Department of Materials Science and Engineering, Tokyo Institute of Technology, 4259 Nagatsuta, Midoriku, Yokohama 226-8503, Japan.
Ultramicroscopy
|May 28, 2023
概括
一个新的光光学系统精确地对齐光和电子束在扫描传输电子显微镜 (STEM). 这使得可同时进行光学和阴极光发光 (CL) 光谱,进行详细的材料分析.
科学领域:
- 材料科学 材料科学 材料科学
- 光学是什么?光学是什么?光学是什么?
- 电子显微镜电子显微镜
背景情况:
- 光线和电子束的精确联合定位对于先进的显微镜技术至关重要.
- 扫描传输电子显微镜 (STEM) 中对光学和电子探针进行对齐的现有方法可能具有挑战性和耗时.
研究的目的:
- 开发和验证一种新的光光学系统,用于精确对准聚焦光束与STEM中的电子束.
- 为了在同一样本位置实现同时进行光学和阴极光发光 (CL) 光谱.
主要方法:
- 在扫描传输电子显微镜 (STEM) 中集成了一种具有抛物线镜的新型光学系统.
- 使用传输光的角分布成像来评估光束位置和焦点.
- 将光图像与电子显微镜进行比较,以获得精确的对齐.
- 使用光朗奇图和激光消光实验确认聚焦的光点大小.
主要成果:
- 实现了光线和电子束辐射位置的准确对齐.
- 证实聚焦的光点大小在几微米范围内.
- 有针对性的激光切除证明了精确的空间控制,而不会损害周围的区域.
- 该系统成功地集成了一个用于光学光谱学的素灯.
结论:
- 开发的光光学系统在STEM中提供了光和电子束的精确共定位.
- 这使空间分辨率的光学和阴极光发光 (CL) 光谱能够进行全面的材料表征.
- 该系统为先进的纳米级光学和电子性质调查提供了有价值的工具.
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