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Updated: Jul 28, 2025

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一个脉冲直流平面磁铁子放电的流体模型

Si Bui Quang Tran1, Fong Yew Leong2, Ramanarayan Hariharaputran2

  • 1Institute of High Performance Computing (IHPC), Agency for Science, Technology and Research (A*STAR), 1 Fusionopolis Way, Connexis, Singapore, 138634, Republic of Singapore. transbq@ihpc.a-star.edu.sg.

Scientific reports
|June 3, 2023
PubMed
概括

脉冲直流 (DC) 磁铁子喷射模拟显示,脉冲增加了电子密度和温度,但降低了沉积率. 调整脉冲频率和工作周期可以控制等离子体特性和沉积结果.

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