通过在上沉积原子层而生长的被动化纳米层结构的稳定化学增强
Sophie L Pain1, Edris Khorani1, Tim Niewelt1,2,3
1School of Engineering, University of Warwick, Coventry, CV4 7AL UK. sophie.l.pain@warwick.ac.uk.
Nanoscale
|June 7, 2023
概括
使用等离子增强原子层沉积 (ALD) 创建的超薄的氧化 (HfO2) 薄膜显著改善了太阳能电池的被动化. 用酸化学增强进一步提高性能,接近理论效率极限.
科学领域:
- 材料科学 材料科学 材料科学
- 纳米技术纳米技术
- 可再生能源可再生能源是可再生能源.
背景情况:
- 载体选择性被动接触对于最大限度地提高太阳能电池功率转换效率至关重要.
- 达到理论效率极限需要先进的接触材料和被动化技术.
研究的目的:
- 为了研究由等离子增强ALD制造的超薄HfO2膜的潜力,使太阳能电池被动化.
- 探索化学增强方法,以改善这些HfO2膜的被动化特性.
- 为太阳能电池应用开发一种用于制造高度被动化纳米薄膜的新途径.
主要方法:
- 用等离子体增强的原子层沉积 (ALD) 来创建1纳米HfO2膜.
- 制造Si/HfO2/Al2O3堆用于增强被动化.
- 使用酸 (HF) 进行表面修饰的化学处理.
- 使用冠状电荷分析,凯尔文探测器测量和X射线光电子谱学 (XPS) 进行了表征.
主要成果:
- 1纳米HfO2薄膜在n型上表现出良好的被动性,表面重组速度 (SRV) 为19 cm s-1.
- 在Si/HfO2/Al2O3堆中,SRV达到3.5厘米s-1.
- 高频浸泡导致稳定的SRV低于2厘米s-1,这是由于介电层的表面化.
- 在短时间暴露于HF后,XPS证实了Al2O3和HfO2膜的化.
结论:
- 超薄的HfO2膜对太阳能电池被动化非常有效.
- 通过表面化进行化学增强,显著提高了被动化质量.
- ALD和化学处理为制造高效太阳能电池的先进纳米级被动化层提供了一个有希望的途径.
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