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Updated: Jul 27, 2025

Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters
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Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters

Published on: February 4, 2018

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对压电MEMS共振器的自身模式和频率控制进行了审查

Zhenming Liu, Farrokh Ayazi

    IEEE transactions on ultrasonics, ferroelectrics, and frequency control
    |June 9, 2023
    PubMed
    概括

    由于制造变化和温度变化,压电微电子机械系统 (MEMS) 共振器需要精确的频率和特异模式控制. 本文回顾了调整和补偿这些共振器的技术,以在各种应用中提供稳定和准确的性能.

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    Characterization of Full Set Material Constants and Their Temperature Dependence for Piezoelectric Materials Using Resonant Ultrasound Spectroscopy07:44

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