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一个基于温度变频器的芯片内温度传感器,不准确度为+0.65°C/-0.49°C
Zicong Xu1, Xuan Zhang2, Sili Chen2
1School of Microelectronics, Shanghai University, Shanghai 201800, China.
Sensors (Basel, Switzerland)
|June 10, 2023
概括
这项研究引入了一种新的CMOS温度传感器,实现了高精度和分辨率. 它利用温度频率转换在0-100°C范围内进行精确的测量.
科学领域:
- 集成电路 集成电路
- 传感器技术 传感器技术
- 半导体设备 半导体设备
背景情况:
- 准确的温度传感对于各种电子系统至关重要.
- 现有的传感器经常面临准确性,分辨率和稳定性方面的挑战.
- CMOS技术为开发先进传感器提供了一个可扩展的平台.
研究的目的:
- 提出并验证基于温度频率转换的新型温度传感器.
- 为了实现高精度和分辨率的温度测量使用180纳米CMOS技术.
- 为了尽量减少工艺变化和电源供应波动的影响.
主要方法:
- 一个温度传感器的设计,包括相对绝对温度 (PTAT) 电流的产生.
- 实施两个放松振荡器 (OSC-PTAT和OSC-CON) 用于温度频率转换.
- 使用双极结晶体管 (BJT) 作为核心温度传感元件.
- 采用电压平均反 (VAF) 来提高振荡器的频率稳定性.
主要成果:
- 传感器在0-100°C范围内工作,校准后的不准确度为+0.65°C/-0.49°C.
- 实现了0.003°C的高分辨率.
- 已经证明了6.7 pJ/K2.2的解决方案价值 (FOM) 数字.
- 制造出来的传感器占地面积为0.059毫米2,消耗32.9微瓦.
结论:
- 拟议的CMOS温度传感器有效地利用温度频率转换进行准确的测量.
- 双振荡器设计和BJT传感模块有助于高精度和分辨率.
- 传感器的性能表明它适用于需要精确温度监测的应用.
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