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Updated: Jul 8, 2026

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一种基于CMOS-MEMS技术的智能主动相变微.

Wenzui Jin1, Yimin Guan2, Qiushi Wang1

  • 1School of Microelectronics, Shanghai University, Shanghai 201800, China.

Sensors (Basel, Switzerland)
|June 10, 2023
PubMed
概括

本研究介绍了一种使用CMOS-MEMS技术的新型活性相变微. 开发的微达到22μL/分钟的最大流量,为微流体系统提供稳定的运行.

关键词:
这就是CMOS-MEMS.有活性的微型.换相微型 换相的微型

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相关概念视频

MOS Capacitor01:25

MOS Capacitor

A Metal-Oxide-Semiconductor (MOS) capacitor is a fundamental structure used extensively in semiconductor device technology, particularly in the fabrication of integrated circuits and MOSFETs (metal-oxide-semiconductor field-effect transistors). The MOS capacitor consists of three layers: a metal gate, a dielectric oxide, and a semiconductor substrate.
The metal gate is typically made from highly conductive materials such as aluminum or polysilicon. Beneath the metal gate lies a thin layer of...