电子显微镜中的场辐射的时间连贯膜函数
Xuan Tan Nguyen1, Michael S Altman1
1Department of Physics, Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong.
Ultramicroscopy
|June 11, 2023
概括
电子显微镜图像受到电子连贯性的影响. 这项研究更新了场辐射源的时间连贯理论,在电子显微镜成像中发现了最小的分辨率损失和焦点偏移.
科学领域:
- 电子显微镜的电子显微镜
- 光学是什么?光学是什么?光学是什么?
- 材料科学 材料科学 材料科学
背景情况:
- 部分电子空间和时间连贯性对电子显微镜成像产生负面影响.
- 以前对时间连贯性的理论处理假定高斯能量分布.
- 现代场辐射 (FE) 源产生非高斯能量分布.
研究的目的:
- 更新对任意电子能量分布的时间连贯性的理论处理.
- 研究FE源对低能电子显微镜 (LEEM) 图像形成的影响.
- 为了比较传统,非偏差校正 (NAC) 和偏差校正 (AC) LEEM中的效应.
主要方法:
- 开发了考虑任意能量分布的时间连贯性的更新理论框架.
- 在富里埃光学模拟中实现了更新的方法.
- 在NAC和AC LEEM中与FE源模拟图像形成.
主要成果:
- 对于FE分布的分辨率退化仅略大于具有相当能量分布的高斯分布.
- 场辐射源在图像形成中引入焦点偏移.
- 与NAC LEEM相比,AC LEEM中的分辨率降低和焦点偏移都不那么明显.
结论:
- 更新的理论准确地描述了LEEM中FE源的时间连贯效应.
- FE源对图像分辨率和焦点有可控的影响,特别是在交流系统中.
- 这些发现与优化光圈选择和分析电子显微镜中的焦点序列有关,并且适用于传输电子显微镜.
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