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用于在SEM加速电压范围中使用的Timepix探测器的特性
Nikita Denisov1, Daen Jannis1, Andrey Orekhov1
1EMAT, University of Antwerp, Groenenborgerlaan 171, Antwerp, 2020, Belgium.
Ultramicroscopy
|June 19, 2023
概括
用于电子显微镜的混合像素探测器的表征揭示了它们的性能指标. 这些关于调制转移函数和侦探量子效率的发现可以转移到类似的基于的探测器.
科学领域:
- 材料科学 材料科学 材料科学
- 物理 物理学 物理
- 电子显微镜电子显微镜
背景情况:
- 混合像素直接电子探测器越来越多地用于电子显微镜.
- 它们的经济实惠性使得它们适合扫描电子显微镜 (SEM) 设置.
- 描述对于理解它们的表现至关重要.
研究的目的:
- 为了描述Advacam Minipix和Advapix探测器的性能.
- 在15-30 keV范围内评估调制转移函数 (MTF) 和探测量子效率 (DQE).
- 评估发现的可转移性到其他基于Medipix的探测器.
主要方法:
- 图像绘制点扩展函数 (PSF) 图像.
- 产生MTF和DQE曲线.
- 在零空间频率下测量DQE (DQE(0)).
主要成果:
- 呈现了PSF图像,MTF/DQE曲线,以及探测器的DQE值.
- 观察到探测器层在近光电流中的行为主导.
- 证明了结果对其他具有相同层的Medipix2,Timepix或Timepix3探测器的潜在可转移性.
结论:
- 描述为Advacam检测器提供了关键性能数据.
- 研究结果表明,它可以广泛应用于其他基于的混合像素探测器.
- 这些负担得起的探测器显示出先进的电子显微镜实验的前景.
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