离子束沉积金作为电接触材料在高温操作电子显微镜实验中
Søren Bredmose Simonsen1, Zhongtao Ma1, Elisabeth Mariegaard1
1DTU Energy, Kgs. Lyngby, Denmark.
Microscopy research and technique
|June 20, 2023
概括
离子束沉积 (Pt) 是高温电子显微镜的稳定电接触物. 随着热处理,其导电性得到改善,使其适合操作实验.
科学领域:
- 材料科学 材料科学 材料科学
- 表面科学是一门学科.
- 分析化学 分析化学
背景情况:
- 运行电子显微镜需要稳定的电接触来进行高温设备分析.
- 由于其特性, (Pt) 是这种应用的潜在候选者.
研究的目的:
- 为了研究离子束沉积的Pt.的纳米结构和电导率.
- 为了确定Pt接触在高温和高电流密度下的稳定性极限.
- 优化 Pt 沉积参数以提高稳定性和降低电阻.
主要方法:
- 膜的离子束沉积.
- 在真空和氧气气氛下的现场电导度测量.
- 微观结构和电性质的温度依赖性表征.
- 对电流密度对Pt薄膜稳定性影响的分析.
主要成果:
- 离子束沉积的Pt具有很好的微观结构稳定性,可达大约800°C和100 kA/cm2.
- 电导率随着温度的增加而增加,主要是由于薄膜的密度.
- 通过在沉积过程中增加离子电流以及在氧气中沉积后的化来降低电阻.
结论:
- 离子束沉积的Pt是一种可行的接触材料,用于在高温下操作电子显微镜.
- 优化沉积和回火程序可以提高Pt接触器的性能.
- 该研究提供了在苛刻的显微镜应用中使用Pt的实际建议.
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