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用于in vivo显微镜的MEMS在镜头中的3D光束扫描仪

David L Dickensheets¹, Tianbo Liu¹, Milind Rajadhyaksha²

¹Electrical and Computer Engineering Department, Montana State University, Bozeman, MT 59715, USA.

Proceedings of SPIE--the International Society for Optical Engineering

|June 23, 2023

概括

这项研究引入了一种用于激光扫描显微镜的新型"MEMS-in-the-lens"活性透镜. 这种创新的光学活检工具通过集成微电机系统扫描仪来实现3D成像,以实现精确的焦点和光束方向.

科学领域:

光学和光子学在光学和光子学.
生物医学工程生物医学工程
显微镜的使用方法

背景情况:

传统的激光扫描显微镜在实现光学活检等应用快速3D成像方面存在局限性.
将活跃光学元件直接集成到显微镜镜头中可以增强成像能力并降低系统复杂性.

研究的目的:

开发和评估一个集成微电机系统 (MEMS) 束扫描器的活性透镜系统,用于3D激光扫描显微镜.
展示这个集成系统在高分辨率光学活检应用中的潜力.

主要方法:

主动镜头设计采用高数值光圈前元件,3D+ MOEMS光束扫描仪,配有金巴和SU-8聚合物曲,以及可变形膜镜.
镜子直径为4毫米,为焦点控制提供9微米的偏移,并使用四个环状电极进行球形偏差调节.
在杆上以±3°的尖端/倾斜触动可实现侧向光束扫描.

主要成果:

通过使用主动镜头的桌面模型成功演示了对焦成像.
该系统显示了精确的焦点控制和侧向光束方向的能力,这对于3D扫描至关重要.

结论:

镜头中的MEMS活性镜头为先进的3D显微镜提供了一个有前途的方法.
这项技术具有很大的潜力,可以实现实时光学活检和其他体内成像应用.

关键词:

活动光学是积极的光学.MEMS扫描镜子扫描镜子 MOEMS 3D 扫描仪 3D 扫描仪可变聚焦镜头变焦镜头可变聚焦镜子镜子

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