一种新的立方-exp评估算法,考虑了共聚焦显微镜的非对称轴向响应信号

Sebastian Hagemeier1, Tobias Pahl1, Johannes Breidenbach1

  • 1Measurement Technology, Department of Electrical Engineering and Computer Science, University of Kassel, Kassel, Germany.

概括

一个新的共聚焦显微镜算法通过有效处理不对称信号来提高深度准确性,提高高度和层厚度的测量.