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Updated: Jul 25, 2025

Free-form Light Actuators — Fabrication and Control of Actuation in Microscopic Scale
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激光干扰光刻法-一种用于制造受控周期结构的方法

Ri Liu1,2,3, Liang Cao1,2,3, Dongdong Liu1,2,3

  • 1International Research Centre for Nano Handling and Manufacturing of China, Changchun University of Science and Technology, Changchun 130022, China.

Nanomaterials (Basel, Switzerland)
|June 27, 2023
PubMed
概括

激光干扰光刻 (LIL) 制造精确的周期性表面结构,以实现高级功能. 本综述探讨了LIL原理,参数控制和材料科学中的各种应用.

关键词:
激光干扰光刻法,激光干扰光刻法.处理激光材料的激光材料加工.微型/纳米结构的形成周期结构是周期结构.表面功能化的功能化.

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