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Qi Liu1,2, Mingjun Chen1, Jian Cheng1
1School of Mechatronics Engineering, Harbin Institute of Technology, Harbin 150001, China.
实现超精密制造需要特殊的元件精度和表面加工. 本研究探讨了先进的技术,以满足这些对卓越性能的严格要求.
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