一个基于Al-Sc合金的高可靠性RF MEMS金属接触开关
Zhongxuan Hou1,2, Yongkang Zhang1, Chaowei Si1
1Engineering Research Center for Semiconductor Integrated Technology, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China.
Micromachines
|June 28, 2023
概括
本研究引入了一种使用- (Al-Sc) 合金的新型射频微电机系统 (RF MEMS) 开关. 这一创新提高了接触硬度和开关可靠性,性能优于传统的黄金-黄金接触.
科学领域:
- 材料科学 材料科学 材料科学
- 电气工程 电气工程
- 微型技术 微型技术
背景情况:
- 传统的无线电频率微电机系统 (RF MEMS) 开关通常使用金金接触器,这些接触器会随着时间的推移退化,影响可靠性.
- 改善接触面的机械性能对于提高射频MEMS设备的寿命和性能至关重要.
研究的目的:
- 开发和描述一种新的金属接触RF MEMS开关,使用- (Al-Sc) 合金.
- 与传统设计相比,评估硬度,可靠性和射频 (RF) 特性方面的性能改进.
主要方法:
- 使用多层堆结构和开发的聚胺牺牲层工艺制造射频MEMS开关.
- 开关的特征,包括拉入电压,S参数 (插入损失和隔离) 和开关时间.
- 使用Al-Sc合金创建比传统的金金接触面更硬的接触面.
主要成果:
- 接触Al-Sc合金显著提高了硬度和开关可靠性.
- 多层堆结构实现了低开关线路阻力和硬接触面.
- 制造的开关显示高隔离 (>24 dB) 和低插入损失 (<0.9 dB) 从0.1到6 GHz.
结论:
- 合金是RF MEMS开关传统黄金接触器的可行替代品,提供更高的可靠性.
- 开发的制造工艺和材料选择导致了卓越的射频性能和耐用性.
- 这项工作有助于推进高性能和持久的射频MEMS开关.
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