模拟优化AlGaN/GaN SBD与场板结构和内置阳极的模拟优化
Tao Xu1, Ziqi Tang2, Ziyou Zhou1
1Key Laboratory of New Processing Technology for Nonferrous Metals and Materials of Ministry of Education, School of Materials Science and Engineering, Collaborative Innovation Center for Exploration of Nonferrous Metal Deposits and Efficient Utilization of Resources, Guilin University of Technology, Guilin 541004, China.
Micromachines
|June 28, 2023
概括
优化的AlGaN/GaN Schottky屏障二极管 (SBD) 使用深陷阳极和场板显著提高前向电流和故障电压. 这些改进为先进的应用带来了优越的电性能.
科学领域:
- 材料科学 材料科学 材料科学
- 电气工程 电气工程
- 半导体物理 半导体物理
背景情况:
- 化/化 (AlGaN/GaN) 异构结构对于高功率电子产品至关重要.
- 肖特基屏障二极管 (SBD) 是功率切换和高频应用中的必不可少的组件.
- 设备优化是释放AlGaN/GaN SBDs全部潜力的关键.
研究的目的:
- 通过设计修改优化AlGaN/GaN SBD.
- 为了研究电极间距,蚀刻深度和现场板尺寸的影响.
- 为了提高设备性能指标,如前向电流和故障电压.
主要方法:
- 技术计算机辅助设计 (TCAD) 模拟使用Silvaco软件进行设备设计和分析.
- 基于模拟衍生参数的AlGaN/GaN SBD芯片的制造.
- 电气行为的实验性表征,包括前向电流,电阻和故障电压.
主要成果:
- 发现一个深陷的阳极设计可以增加前向电流并降低电阻.
- 30纳米的蚀刻深度产生了0.75V的开启电压和216mA/mm的前向电流密度.
- 一个3微米的场板实现了1043V的故障电压和572.6MW/cm2的功率功率 (FOM).
结论:
- 陷入的阳极和场板结构有效地提高了AlGaN/GaN SBD中的断裂电压和前向电流.
- 优化的设备设计导致功率功率 (FOM) 的显著改善.
- 提高电气性能扩大了这些高性能二极管的应用范围.
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