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对复杂光学表面的光学计量学的研究,具有焦点平面波面传感的复杂光学表面
Xinxue Ma1, Jianli Wang1, Bin Wang1
1Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China.
Micromachines
|June 28, 2023
概括
这项研究验证了使用焦平面图像数据进行复杂光学表面计量学的波面传感. 该技术准确地测量了表面误差,匹配ZYGO干扰仪的结果,证明了它的可行性.
科学领域:
- 光学计量学 在光学计量学
- 精密光学是指精确的光学.
- 波浪前线传感 波浪前线传感
背景情况:
- 复杂的光学元件提高图像质量和视野,对于X射线设备和激光器等应用至关重要.
- 高精度测试对于精密加工中复杂的光学表面至关重要.
- 精确有效地测量复杂的光学表面仍然是光学计量学的挑战.
研究的目的:
- 通过基于焦平面图像信息的波面传感来验证光学计量学的能力.
- 为了验证这种波面传感技术对复杂光学表面的可行性和准确性.
主要方法:
- 建立了各种光学表面的实验平台.
- 为了确保可靠性,进行了重复的实验.
- 测量结果与ZYGO干扰仪进行了比较,以验证.
主要成果:
- 基于焦平面图像信息的波面传感显示出与ZYGO干扰仪结果的良好一致.
- 错误分布,PV (高峰到低谷) 值和RMS (根-平均-平方) 值显示出高度一致.
- 该技术准确地描述了复杂的光学表面.
结论:
- 使用焦平面图像信息的波面传感是复杂的光学表面计量学的可行和有效的技术.
- 这种方法为精密光学中高精度测试提供了一个有前途的方法.
- 这些发现支持在先进的光学测量应用中使用这种技术.
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