使用转移矩阵方法在冲击下MEMS悬浮电感器的机械反应
1School of Mechatronical Engineering, Beijing Institute of Technology, Beijing 100081, China.
Micromachines
|June 28, 2023
概括
本研究介绍了多体系统转移矩阵方法 (MSTMM),用于分析MEMS悬浮电感器在冲击负载下变形. MSTMM准确地预测机械行为,为有限元法 (FEM) 提供了替代方案.
科学领域:
- 电气工程 电气工程
- 机械工程 机械工程
- 材料科学 材料科学 材料科学
背景情况:
- 微电机系统 (MEMS) 悬浮电感器可以在外力下变形,降低电性能.
- 对于冲击负荷反应的传统分析通常依赖于数值方法,如有限元法 (FEM).
研究的目的:
- 通过使用替代方法,研究MEMS悬浮电感器在冲击负载下的机械行为.
- 在没有直接冲击模拟的情况下,准确确定动态反应,最大位移和应力.
主要方法:
- 该研究使用多体系统转移矩阵方法 (MSTMM) 进行分析.
- 计算了自然频率和模式形状,然后通过模态叠加确定动态响应.
- 理论上确定高峰反应时间和位置,独立于冲击特点.
主要成果:
- 该MSTMM成功预测了自然频率和模式形状.
- 该方法准确地确定了最大位移和·米塞斯压力的时间和位置.
- 分析显示了冲击幅度和频率对电感器响应的影响.
结论:
- 多体系统转移矩阵方法 (MSTMM) 为分析MEMS电感器冲击反应提供了准确而高效的FEM替代方案.
- 这种方法可以在动态负载下理论预测关键的机械行为.
- 这些发现有助于理解和减轻MEMS感应器中因变形引起的性能降低.
相关概念视频
Magnetic Damping
504
Eddy currents can produce significant drag on motion, called magnetic damping. For instance, when a metallic pendulum bob swings between the poles of a strong magnet, significant drag acts on the bob as it enters and leaves the field, quickly damping the motion.
If, however, the bob is a slotted metal plate, the magnet produces a much smaller effect. When a slotted metal plate enters the field, an emf is induced by the change in flux; however, it is less effective because the slots limit the...
If, however, the bob is a slotted metal plate, the magnet produces a much smaller effect. When a slotted metal plate enters the field, an emf is induced by the change in flux; however, it is less effective because the slots limit the...
504
Mechanical Systems
243
Mechanical systems are analogous to to electrical networks where springs and masses play similar roles to inductors and capacitors, respectively. A viscous damper in mechanical systems functions similarly to a resistor in electrical networks, dissipating energy. The forces acting on a mass in such systems include an applied force in the direction of motion, counteracted by forces from the spring, a viscous damper, and the mass's acceleration. This interplay of forces is mathematically...
243
Cell-matrix's Response to Mechanical Forces
2.7K
In animal cells, the extracellular matrix allows cells within tissues to withstand external stresses and transmits signals from the outside of the cell to the inside. The extracellular matrix is extensive, and its composition varies between different types of tissues. For example, the reticular fibers and ground substance make up the ECM in loose connective tissue, while collagen and bone minerals make up the ECM of bone tissue.
Anchoring junctions mechanically attach a cell to the...
Anchoring junctions mechanically attach a cell to the...
2.7K
Electro-mechanical Systems
1.0K
Electromechanical systems are intricate configurations that effectively combine electrical and mechanical elements to achieve a desired outcome. Central to many of these systems is the DC motor, a device that converts electrical energy into mechanical motion, enabling various applications ranging from simple fans to complex robotic mechanisms.
A key component of the DC motor is the armature, a rotating circuit positioned within a magnetic field. As an electric current passes through the...
A key component of the DC motor is the armature, a rotating circuit positioned within a magnetic field. As an electric current passes through the...
1.0K
Bus Impedance Matrix
151
Calculating subtransient fault currents for three-phase faults in an N-bus power system involves using the positive-sequence network. When a three-phase short circuit occurs at a specific bus, the analysis uses the superposition method to evaluate two separate circuits.
In the first circuit, all machine voltage sources are short-circuited, leaving only the prefault voltage source at the fault location. The positive-sequence bus impedance matrix can be determined by solving the nodal equations,...
In the first circuit, all machine voltage sources are short-circuited, leaving only the prefault voltage source at the fault location. The positive-sequence bus impedance matrix can be determined by solving the nodal equations,...
151
Mutual Inductance
2.4K
Inductance is the property of a device that tells us how effectively it induces an emf in another device. In other words, it is a physical quantity that expresses the effectiveness of a given device.
When two circuits carrying time-varying currents are close to one another, the magnetic flux through each circuit varies because of the changing current in the other circuit. Consequently, an emf is induced in each circuit by the changing current in the other. Therefore, this type of emf is called...
When two circuits carrying time-varying currents are close to one another, the magnetic flux through each circuit varies because of the changing current in the other circuit. Consequently, an emf is induced in each circuit by the changing current in the other. Therefore, this type of emf is called...
2.4K


