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在GaN基设备中提高动态电阻,使用高质量的In Situ SiN被动化层
Jeong-Gil Kim1, Jun-Hyeok Lee2, Dong-Min Kang1
1Terrestrial & Non-Terrestrial Integrated Telecommunications Research Laboratory, Electronics and Telecommunications Research Institute, Daejeon 34129, Republic of Korea.
Micromachines
|June 28, 2023
概括
在现场化 (SiN) 的被动化增强了通常开启/关闭的AlGaN/GaN金属绝缘体半导体高电子流动性晶体管 (MISHEMT). 这种方法改善了直流特性,减少了动态电阻,并提高了先进电源设备的故障性能.
科学领域:
- 材料科学 材料科学 材料科学
- 半导体物理 半导体物理
- 电气工程 电气工程
背景情况:
- /金属绝缘半导体高电子移动性晶体管 (MISHEMT) 对功率电子非常重要.
- 消极化对于提高设备性能和可靠性至关重要.
- 现场和现场化 (SiN) 是常见的被动化材料.
研究的目的:
- 为了比较通常开启/关闭的AlGaN/GaN MISHEMT被in situ SiN与ex situ SiN消极化的特征.
- 评估现场SiN被动化对直流特性,动态电阻和故障性能的影响.
- 了解现场SiN被动化如何影响表面捕获效应和离位泄漏电流.
主要方法:
- 制造AlGaN/GaN MISHEMT,具有in situ和ex situSiN被动化层. 在现场和现场的SiN被动化层.
- 描述直流性能,包括排水电流和开/关电流的比率.
- 在操作中测量动态上电阻 (RON) 增加.
- 评估故障特征和州外泄漏电流.
主要成果:
- 在现场SiN被动化导致增强的直流特性:排水电流为595mA/mm (正常开启) 和175mA/mm (正常关闭).
- 高开/关电流比约107是通过in situSiN被动化实现的.
- 显著较低的动态上电阻增加:4.1% (正常开启) 和12.8% (正常关闭) 在现场SiN.
- 大大改善了故障特性,并减少了局外泄漏电流与现场SiN.
结论:
- 在现场SiN被动化显著提高了AlGaN/GaN MISHEMTs的直流特性和可靠性.
- 在现场的SiN层有效地抑制了表面捕获效应,并减少了非状态泄漏电流.
- 这种被动化技术对于开发高性能基于GaN的动力设备是非常有益的.
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