一个低噪音接口ASIC用于MEMS磁盘共振器陀螺仪
Wenbo Zhang1,2, Liang Yin1,2, Yihang Wang1,2
1MEMS Center, Harbin Institute of Technology, Harbin 150001, China.
Micromachines
|June 28, 2023
概括
本研究介绍了一种低噪音的特定应用集成电路 (ASIC) 用于微电子机械系统 (MEMS) 磁盘共振器陀螺仪 (DRG). 新的设计实现了卓越的性能,降低了噪音,提高了陀螺仪的精度.
科学领域:
- * 电气工程 电气工程
- * 机械工程 机械工程
- * 传感器技术 * 传感器技术
背景情况:
- *微电机械系统 (MEMS) 磁盘共振器陀螺仪 (DRG) 对于惯性导航至关重要.
- *现有的DRG接口电路面临着噪声和准确性方面的挑战.
- *强制再平衡 (FTR) 模式操作需要复杂的控制电路.
研究的目的:
- *为在FTR模式下运行的MEMS DRG提出一个低噪声的应用特定集成电路 (ASIC).
- * 开发一个集成的自钟电路,以减少组件数量.
- * 实施系统级噪声模型,以识别和减轻噪声源.
主要方法:
- * ASIC的设计包括模拟闭环控制 (自我激发的驱动,速率和方位循环).
- * 集成Sigma-Delta (ΣΔ) 调制器和数字过器,用于模拟到数字转换.
- * 开发了一种自钟电路,以消除对外部石英晶体的需求.
- *系统级噪声建模和分析,以识别和最小化噪声贡献.
- *实施噪声优化战略,以减轻1/f和白噪声.
主要成果:
- * 达到角随机步行 (ARW) 的0.0075°/√h.
- * 达到0.038°/h的偏差不稳定性 (BI).
- *以0.35微米工艺制造的ASIC,模具面积为4.4mm × 4.5mm.
- * 证明低功耗50mW的低功耗.
- *成功避免了PI放大器的1/f噪声和反元件的白噪声.
结论:
- * 拟议的低噪音ASIC显著提高了MEMS DRG的性能.
- * 集成设计和噪声优化技术对于芯片级实施是有效的.
- * 自动计时电路简化了系统架构,减少了外部组件.
- * 取得的ARW和BI指标代表了陀螺仪技术的重大进步.
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