Ti-Yuan Shan1, Xiao-Sheng Wu1, Yuan-Wen Hu2

  • 1School of Electronic Information and Electrical Engineering, Shanghai Jiao Tong University, Shanghai 200000, China.

Micromachines
|June 28, 2023
PubMed
概括

这项研究介绍了一种新的喷嘴驱动的压电微喷气装置,用于精确的结构处理. 实验验证了它的性能和稳定性,证实了它在先进制造应用中的优越性.