基于接触弧长度变化的固定钻石磨砂丝切削力建模
Lie Liang1, Shujuan Li1, Kehao Lan1
1School of Mechanical and Precision Instrument Engineering, Xi'an University of Technology, Xi'an 710048, China.
Micromachines
|June 28, 2023
概括
固定钻石磨砂丝 (FAW) 切割单晶是具有挑战性的,因为材料属性. 这项研究模拟了切割过程,准确预测力和痕,提高了晶圆加工效率.
科学领域:
- 材料科学 材料科学 材料科学
- 制造业 工程 制造工程
- 半导体加工 半导体加工
背景情况:
- 单晶对于半导体至关重要,但由于其硬度和脆性,很难加工.
- 固定钻石磨砂丝 (FAW) 切割是硬质和易碎材料的首选方法,提供了最小的隙损失和低切割力等优势.
研究的目的:
- 开发和验证FAW切割单晶晶片的接触弧长和切削力模型.
- 在晶圆切片过程中分析切割参数对弓角和接触弧长的影响.
主要方法:
- 通过分析切割系统,建立了接触弧长的模型.
- 开发了一种随机磨砂颗粒分布模型来计算切削力.
- 使用代算法来确定切削力和芯片表面痕.
- 使用模拟来研究弓角,接触弧长和切割参数之间的关系.
主要成果:
- 与实验数据相比,模拟结果显示平均切削力误差不到6%,弧几何误差不到5%.
- 该研究发现,随着更高的部件料率,弓角和接触弧长度都会增加.
- 相反,随着电线速度的增加,弓角和接触弧长度会减少.
结论:
- 开发的模型准确地预测了单晶的FAW切割的切削力和几何特征.
- 了解切割参数,弓角和接触弧长之间的关系对于优化晶圆切割过程至关重要.
- 这些发现有助于更高效,更精确地制造半导体组件.
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