概括
本研究引入了一种相位补偿方法,用于连贯扫描干涉测量 (CSI). 这项技术提高了快速,广域3D成像的效率,具有纳米级精度.
科学领域:
- 光学计量学 在光学计量学
- 纳米尺度成像技术的使用
- 干涉测量是干涉测量的方法.
背景情况:
- 一致扫描干涉测量 (CSI) 提供了纳米精度的3D成像.
- 系统效率通常受到采集速度限制的限制.
研究的目的:
- 开发基于五秒激光的CSI的相位补偿方法.
- 为了提高纳米尺度型号测试的效率和速度.
主要方法:
- 实施相位补偿技术以减少干扰计边缘期.
- 同步的异质频率与秒激光的重复频率.
- 使用基于秒激光的CSI进行高速扫描.
主要成果:
- 实现更长的抽样间隔,提高采集效率.
- 保持了根-平方-平均轴误差低至2nm.
- 证明了每6.44微米的高扫描速度.
结论:
- 拟议的方法显著提高了CSI系统的速度.
- 在大面积上实现了快速而精确的纳米尺度分析.
- 克服当前CSI获取系统中的局限性.
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