低损耗的3维波导交叉与一个基于SiN-SiN-Si三层平台的抛物线形形间层合器
Optics letters
|June 30, 2023
概括
我们开发了一种新的化--化 (SiN-SiN-Si) 波导交叉,实现超低损失和交叉声. 这一进步显著提高了集成光子电路的性能.
科学领域:
- 光子学是指光子学的使用方法.
- 材料科学 材料科学 材料科学
- 电气工程 电气工程
背景情况:
- 集成光子学依赖于高效的波导交叉.
- 在多层波导中最大限度地减少损失和交声对于设备性能至关重要.
研究的目的:
- 为了证明一个低损失的SiN-SiN-Si三层波导交叉.
- 为多层光子集成电路开发一种高效的层间合器.
主要方法:
- 制造一个SiN-SiN-Si三层波导结构.
- 使用抛物线层间合设计来减少损失和长度.
- 在特定波长范围内,波导交叉损失,交叉声和层间合损失的表征.
主要成果:
- 实现了超低损失 (<0.82/1.16 mdB) 和交叉声 (<-56/-48 dB) 在地下通道和高架通道的交叉路口.
- 对于SiN-SiN-Si平台,证明了创纪录的低层间合损失 (<0.11dB).
- 将总层间合器长度减少到120微米.
结论:
- 开发的SiN-SiN-Si波导交叉为集成光子学提供了卓越的性能.
- 抛物线层间合器设计有效地最大限度地减少损失和足迹.
- 这项技术使得光子集成电路更加复杂和高效.
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