活性探头原子力显微镜与四平行杆阵列用于高通量大规模样本检查
Fangzhou Xia1, Kamal Youcef-Toumi2, Thomas Sattel3
1Mechatronics Research Lab, Department of Mechanical Engineering, Massachusetts Institute of Technology; xiafz@mit.edu.
Journal of visualized experiments : JoVE
|July 3, 2023
概括
这项研究引入了一种新型的原子力显微镜 (AFM),使用主动悬臂阵列进行高通量,大规模的纳米级成像. 这种并行成像方法显著增加了检查半导体晶片等大表面的吞吐量.
科学领域:
- 材料科学与工程 材料科学与工程
- 纳米技术 纳米技术
- 计量学 计量学 计量学
背景情况:
- 原子力显微镜 (AFM) 对于纳米级表面成像至关重要,但对于大面积检查而言,其低吞吐量受到限制.
- 现有的高速AFM牺牲了成像区域,以实现动态过程可视化.
- 检查大型纳米制造结构要求在广的区域具有高空间分辨率和生产力.
研究的目的:
- 开发一种高通量AFM系统,能够进行大规模纳米级成像.
- 为了克服传统单杆AFM的吞吐量限制.
- 为了实现有效的计量数据采集,用于工业检查应用.
主要方法:
- 采用了一系列带有集成形电阻传感器和热力学执行器的活跃悬臂,用于并行成像.
- 实现了大范围的纳米定位器和先进的控制算法,用于单独的悬臂操作.
- 采用数据驱动的后处理,用于图像拼接和自动缺陷检测.
主要成果:
- 证明了同时的多杆操作,显著增加成像吞吐量.
- 成功捕获了网格的纳米级3D地形图像, pyrolytic石墨和EUV光刻面具.
- 展示了将多个图像拼接在一起以覆盖大面积的高分辨率的潜力.
结论:
- 开发的活跃悬臂阵列AFM为高通量,大规模纳米级成像提供了可行的解决方案.
- 这项技术可以在各种应用中集成用于计量数据采集,包括EUV口罩检查和半导体制造.
- 进一步的工程集成有望为先进的工业检查需求提供增强的能力.
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