新型挥发性异构体复合物使用四牙联体和β-二联体联体
Chanwoo Park1,2, Heenang Choi1, Ga Yeon Lee1
1Thin Film Materials Research Center, Korea Research Institute of Chemical Technology, 141 Gajeong-ro, Yuseong Daejeon 34114, Korea.
ACS omega
|July 3, 2023
概括
合成了新的异质感复合物,并显示出高波动性. 这些化合物是含薄膜原子层沉积和化学蒸气沉积的有希望的前体.
科学领域:
- 无机化学 无机化学 有机化学
- 材料科学 材料科学 材料科学
- 纳米技术纳米技术
背景情况:
- 含的薄膜对于各种电子应用至关重要.
- 开发挥发性和稳定的前体对于先进的沉积技术至关重要.
研究的目的:
- 合成新的异质复合物.
- 评估它们作为原子层沉积 (ALD) 和化学蒸气沉积 (CVD) 的前体的适用性.
主要方法:
- 通过连接体替代合成复合物.
- 使用富里埃变换红外光谱学,核磁共振,热重力测量分析和元素分析进行表征.
- 通过单晶X射线晶体学进行结构分析.
主要成果:
- 两种新型的异质复合物[Ba(ddemap) ((tmhd) ]2 (1) 和[Ba(ddemmp) ((tmhd) ]2 (2) 已成功合成.
- 综合体1显示了一个具有μ2-O键的二维结构.
- 所有合成的复合物都表现出高挥发性,并在降压下在160°C时升华.
结论:
- 新型复合物具有高度挥发性和热稳定性.
- 它们是ALD和CVD应用在生长含薄膜中的有希望的前体.
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