用于生物传感的石墨烯涂层CMOSISFET的稳定性提高
IEEE transactions on biomedical circuits and systems
|July 3, 2023
概括
石墨烯转移增强了对离子敏感的场效应晶体管阵列,用于pH传感. 多层石墨烯通过减少漂移提高了可靠性,而单层石墨烯提供了更好的统一性.
科学领域:
- 材料科学 材料科学 材料科学
- 纳米技术纳米技术
- 传感器技术 传感器技术
背景情况:
- 对离子敏感的场效应晶体管 (ISFET) 对于pH感应至关重要.
- 商业互补金属氧化物半导体 (CMOS) 技术使ISFET阵列制造成为可能.
- 石墨烯的独特特性为传感器增强提供了潜力.
研究的目的:
- 为了提高ISFET阵列的性能和可靠性,用于pH传感.
- 研究石墨烯转移对传感器非理想性的影响.
- 为了比较单层和多层石墨烯在ISFET应用中的性能.
主要方法:
- 使用了聚合物辅助石墨烯转移技术.
- 将单层和多层石墨烯转移到ISFET阵列的被动化层上.
- 使用0.35微米CMOS技术制造的ISFET阵列.
主要成果:
- 石墨烯转移抑制了离子运输和化物水合,改善了传感器的响应.
- 增强的表面水友性,电导率和分子扩散改善了空间的一致性.
- 多层石墨烯降低了漂移率 (~25%) 和振幅 (~59%),pH敏感度损失最小.
- 单层石墨烯提供了更好的时间和空间均性,这是由于一致的厚度和较低的缺陷密度.
结论:
- 石墨烯转移是提高ISFET阵列性能和pH传感可靠性的有效方法.
- 多层石墨烯为减少漂移提供了有利的权衡,而单层石墨烯在均性方面表现出色.
- 该研究表明,石墨烯有潜力解决ISFET传感器响应中的非理想性问题.
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